Details
- Application number :
- 2003284683
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma processing method and apparatus
- Inventor :
- Koshiishi, Akira
;
Sasaki, Hiromitsu
;
Ishihara, Hiroyuki
;
Hirose, Jun
;
Yoshida, Tetsuo
;
Numata, Kohji
;
Ogasawara, Masahiro
;
Saito, Michishige
;
Hirano, Taichi
;
Ooyabu, Jun
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 November 2003
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481
- Old name :
-
- Original Source :
- Go
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