Plasma processing apparatus and plasma processing method
A Standard patent application filed on 14 July 2003 credited to Iwai, Tetsuhiro ; Arita, Kiyoshi

Details

Application number :
2003243016  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma processing apparatus and plasma processing method  
Inventor :
Iwai, Tetsuhiro ; Arita, Kiyoshi  
Agent name :
 
Address for service :
 
Filing date :
14 July 2003  
Associated companies :
 
Applicant name :
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.  
Applicant address :
1006, Oaza Kadoma, Kadoma-shi, Osaka 571-8501  
Old name :
 
Original Source :
Go  

Related Patents

Same Inventor