Details

Application number :
2002247433  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma processing method and apparatus with control of plasma excitation power  
Inventor :
Huang, Chung-Ho ; Jiang, Weinan ; Ni, Tuqiang ; Lin, Frank  
Agent name :
 
Address for service :
 
Filing date :
29 March 2002  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538-6516  
Old name :
 
Original Source :
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