Plasma processing method and apparatus
A Standard patent application filed on 21 May 1998 credited to Moriyama, Koichiro ; Otoshi, Hirokazu ; Kanai, Masahiro ; Aota, Yukito

Details

Application number :
68025  
Application type :
Standard  
Application status :
SEALED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma processing method and apparatus  
Inventor :
Moriyama, Koichiro ; Otoshi, Hirokazu ; Kanai, Masahiro ; Aota, Yukito  
Agent name :
SPRUSON & FERGUSON  
Address for service :
GPO Box 3898 SYDNEY NSW 2001  
Filing date :
21 May 1998  
Associated companies :
 
Applicant name :
Canon Kabushiki Kaisha  
Applicant address :
30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146 Japan  
Old name :
 
Original Source :
Go  

Related Patents