Plasma processing method and apparatus
A Standard patent application filed on 07 May 2001 credited to Fraim, Michael Lee ; Schiewe, Robert R. ; Spielman, Rick B.

Details

Application number :
2001261266  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma processing method and apparatus  
Inventor :
Fraim, Michael Lee ; Schiewe, Robert R. ; Spielman, Rick B.  
Agent name :
 
Address for service :
 
Filing date :
07 May 2001  
Associated companies :
 
Applicant name :
Essox Research and Development, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Related Patents