Plasma processing method and apparatus

Application number :: 2001279189
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Plasma processing method and apparatus
Inventor :: Mitrovic, Andrej S. ; Quon, Bill H. ; Tsukamoto, Yuji ; Sirkis, Murray D. ; Parsons, Richard ; Strang, Eric J.
Agent name :
Address for service :
Filing date :: 06 August 2001
Associated companies :
Applicant name :: Tokyo electron Limited
Applicant address :
Old name :
Original Source :: Go

Plasma processing method and apparatus A Standard patent application filed on 06 August 2001 credited to Mitrovic, Andrej S. ; Quon, Bill H. ; Tsukamoto, Yuji ; Sirkis, Murray D. ; Parsons, Richard ; Strang, Eric J.