Method and apparatus for processing a wafer
A Standard patent application filed on 08 March 2000 credited to Ravkin, Michael

Details

Application number :
35217  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for processing a wafer  
Inventor :
Ravkin, Michael  
Agent name :
 
Address for service :
 
Filing date :
08 March 2000  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

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