Method and apparatus for accessing a multiple chamber semiconductor wafer processing system
A Standard patent application filed on 25 June 2002 credited to Sunkara, Raja ; Jevtic, Dusan

Details

Application number :

2002316375  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for accessing a multiple chamber semiconductor wafer processing system  

Inventor :

Sunkara, Raja ; Jevtic, Dusan  

Agent name :

 

Address for service :

 

Filing date :

25 June 2002  

Associated companies :

 

Applicant name :

APPLIED MATERIALS, INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95054  

Old name :

 

Original Source :

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