Apparatus and method for backfilling a semiconductor wafer process chamber
A Standard patent application filed on 10 July 2003 credited to Torkaman, Amir

Details

Application number :
2003253873  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for backfilling a semiconductor wafer process chamber  
Inventor :
Torkaman, Amir  
Agent name :
 
Address for service :
 
Filing date :
10 July 2003  
Associated companies :
 
Applicant name :
AVIZA TECHNOLOGY, INC.  
Applicant address :
440 Kings Village Road, Scotts Valley, CA 95066  
Old name :
 
Original Source :
Go  

Same Inventor