Method for post-etch and strip residue removal on coral films
A Standard patent application filed on 20 December 2002 credited to Delarios, John ; Ravkin, Michael ; Mikhaylichenko, Katrina

Details

Application number :

2002361829  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for post-etch and strip residue removal on coral films  

Inventor :

Delarios, John ; Ravkin, Michael ; Mikhaylichenko, Katrina  

Agent name :

 

Address for service :

 

Filing date :

20 December 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538-6470  

Old name :

 

Original Source :

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