Measuring the surface properties of polishing pads using ultrasonic reflectance
A Standard patent application filed on 02 September 2003 credited to Obeng, Yaw S.

Details

Application number :
2003268302  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Measuring the surface properties of polishing pads using ultrasonic reflectance  
Inventor :
Obeng, Yaw S.  
Agent name :
 
Address for service :
 
Filing date :
02 September 2003  
Associated companies :
 
Applicant name :
OBENG, Yaw, S.  
Applicant address :
272 Lytton Circle, Orlando, FL 32824  
Old name :
 
Original Source :
Go  

Same Inventor