A polishing pad having a water-repellant film thereon and a method for manufacturing the same
A Standard patent application filed on 29 February 2000 credited to Obeng, Yaw S.

Details

Application number :
33841  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
A polishing pad having a water-repellant film thereon and a method for manufacturing the same  
Inventor :
Obeng, Yaw S.  
Agent name :
 
Address for service :
 
Filing date :
29 February 2000  
Associated companies :
 
Applicant name :
Lucent Technologies Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor