A method of altering and preserving the surface properties of a polishing pad and specific applications therefor
A Standard patent application filed on 27 November 2001 credited to Obeng, Yaw S. ; Yokley, Edward M.

Details

Application number :
2002225745  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
A method of altering and preserving the surface properties of a polishing pad and specific applications therefor  
Inventor :
Obeng, Yaw S. ; Yokley, Edward M.  
Agent name :
 
Address for service :
 
Filing date :
27 November 2001  
Associated companies :
 
Applicant name :
Exigent  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor