Crosslinked polyethylene polishing pad for chemical-mechnical polishing, polishing apparatus and polishing method
A Standard patent application filed on 27 November 2001 credited to Obeng, Yaw S.
;
Yokley, Edward M.
Details
Application number :
2002217867
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Crosslinked polyethylene polishing pad for chemical-mechnical polishing, polishing apparatus and polishing method
Inventor :
Obeng, Yaw S.
;
Yokley, Edward M.
Agent name :
Address for service :
Filing date :
27 November 2001
Associated companies :
Applicant name :
PSILOQUEST, INC.
Applicant address :
Suite 650, 6901 TPC Boulevard
Orlando, FL 32822
United States of America