Thermal management with filled polymeric polishing pads and applications therefor
A Standard patent application filed on 31 October 2002 credited to Obeng, Yaw S.
;
Yokley, Edward M.
Details
Application number :
2002343600
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Thermal management with filled polymeric polishing pads and applications therefor