Details
- Application number :
- 2002345365
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method
- Inventor :
- Haji, Hiroshi
;
Arita, Kiyoshi
;
Iwai, Tetsuhiro
;
Sakemi, Shoji
;
Matano, Taiji
;
Satou, Nobuhiro
- Agent name :
-
- Address for service :
-
- Filing date :
- 24 June 2002
- Associated companies :
-
- Applicant name :
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Applicant address :
- 1006, Oaza Kadoma, Kadoma-shi, Osaka 571-0050
- Old name :
-
- Original Source :
- Go