Toggle navigation
PATENT LOOKUP
Home
About
Search Tips
Search
Plasma treating apparatus
A Standard patent application filed on 24 June 2002 credited to Haji, Hiroshi ; Iwai, Tetsuhiro ; Sakemi, Shoji ; Arita, Kiyoshi
Details
Application number :
2002345366
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Plasma treating apparatus
Inventor :
Haji, Hiroshi ; Iwai, Tetsuhiro ; Sakemi, Shoji ; Arita, Kiyoshi
Agent name :
Address for service :
Filing date :
24 June 2002
Associated companies :
Applicant name :
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Applicant address :
1006, Oaza Kadoma, Kadoma-shi, Osaka 5710050
Old name :
Original Source :
Go
Related Patents
Electrode member for plasma treating apparatus, plasma treating...
Plasma treating apparatus and plasma treating method
Apparatus for treating surfaces of a substrate with atmospheric...
Apparatus and method for treating objects with radicals generated...
Apparatus suitable for plasma surface treating and process for...
Same Inventor
Electrode member for plasma treating apparatus, plasma treating...
PATENT LOOKUP
Home
Browse
About
Search Tips