Plasma treating apparatus and plasma treating method
A Standard patent application filed on 20 August 2002 credited to Terayama, Junichi ; Iwai, Tetsuhiro ; Arita, Kiyoshi

Details

Application number :
2002326159  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma treating apparatus and plasma treating method  
Inventor :
Terayama, Junichi ; Iwai, Tetsuhiro ; Arita, Kiyoshi  
Agent name :
 
Address for service :
 
Filing date :
20 August 2002  
Associated companies :
 
Applicant name :
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.  
Applicant address :
1006, Oaza Kadoma, Kadoma-shi, Osaka 571-0050  
Old name :
 
Original Source :
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