Illumination system for microlithography

Application number :: 2003236640
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Illumination system for microlithography
Inventor :: Hainz, Joachim ; Wietzorrek, Jochen ; Wangler, Johannes ; Singer, Wolfgang ; Schuster, Karl-Heinz ; Antoni, Martin ; Dinger, Udo ; Schultz, Jorg
Agent name :
Address for service :
Filing date :: 13 May 2003
Associated companies :
Applicant name :: CARL ZEISS SMT AG
Applicant address :: Carl-Zeiss-Strasse 22, 73447 Oberkochen
Old name :
Original Source :: Go

Illumination system for microlithography A Standard patent application filed on 13 May 2003 credited to Hainz, Joachim ; Wietzorrek, Jochen ; Wangler, Johannes ; Singer, Wolfgang ; Schuster, Karl-Heinz ; Antoni, Martin ; Dinger, Udo ; Schultz, Jorg