Polarization-optimized axicon system, and an illuminating system for microlithographic projection system having such an axicon system
A Standard patent application filed on 29 August 2003 credited to Kohl, Alexander ; Fiolka, Damian ; Singer, Wolfgang ; Maul, Manfred ; Furter, Gerhard

Details

Application number :

2003264131  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Polarization-optimized axicon system, and an illuminating system for microlithographic projection system having such an axicon system  

Inventor :

Kohl, Alexander ; Fiolka, Damian ; Singer, Wolfgang ; Maul, Manfred ; Furter, Gerhard  

Agent name :

 

Address for service :

 

Filing date :

29 August 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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