Details

Application number :
84911  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Illumination design for scanning microlithography systems  
Inventor :
Partlo, William N  
Agent name :
 
Address for service :
 
Filing date :
16 July 1998  
Associated companies :
 
Applicant name :
Cymer, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor