Details
- Application number :
- 84911
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Illumination design for scanning microlithography systems
- Inventor :
- Partlo, William N
- Agent name :
-
- Address for service :
-
- Filing date :
- 16 July 1998
- Associated companies :
-
- Applicant name :
- Cymer, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go