Illumination device for a microlithographic projection-exposure system
A Standard patent application filed on 04 October 2003 credited to Wangler, Johannes ; Bieling, Stig ; Degunther, Markus

Details

Application number :

2003276050  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Illumination device for a microlithographic projection-exposure system  

Inventor :

Wangler, Johannes ; Bieling, Stig ; Degunther, Markus  

Agent name :

 

Address for service :

 

Filing date :

04 October 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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