A zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system
A Standard patent application filed on 30 August 2002 credited to Koehler, Jess

Details

Application number :
2002324074  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
A zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system  
Inventor :
Koehler, Jess  
Agent name :
 
Address for service :
 
Filing date :
30 August 2002  
Associated companies :
 
Applicant name :
CARL ZEISS SMT AG  
Applicant address :
Carl-Zeiss-Strasse 22, 73447 Oberkochen Germany  
Old name :
 
Original Source :
Go  

Same Inventor