Illuminating device for a microlithographic projection illumination system

Application number :: 2003255441
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Illuminating device for a microlithographic projection illumination system
Inventor :: Maul, Manfred
Agent name :
Address for service :
Filing date :: 14 August 2003
Associated companies :
Applicant name :: CARL ZEISS SMT AG
Applicant address :: Carl-Zeiss-Strasse 22, 73447 Oberkochen
Old name :
Original Source :: Go

Illuminating device for a microlithographic projection illumination system A Standard patent application filed on 14 August 2003 credited to Maul, Manfred