Details
- Application number :
- 2003211846
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method of plasma etching
- Inventor :
- Kitamura, Akinori
;
Jy, Jeong
;
Fujimoto, Kiwamu
;
Yamaguchi, Tomoyo
;
Wada, Nobuhiro
;
Fuse, Takashi
;
Obi, Machiko
- Agent name :
-
- Address for service :
-
- Filing date :
- 07 March 2003
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481
- Old name :
-
- Original Source :
- Go