Details

Application number :
2002250223  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method of plasma etching low-k organosilicate materials  
Inventor :
Helmer, Bryan A. ; Zhu, Helen H. ; Li, Si Yi ; Sadjadi, S. M. Reza ; Tietz, James V.  
Agent name :
 
Address for service :
 
Filing date :
21 March 2002  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
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