Method of plasma etching organic antireflective coating
A Standard patent application filed on 21 March 2002 credited to Lee, Chris ; Chiang, Conan ; Jiang, Weinan ; Lin, Frank Y. ; Ni, Tuqiang ; Lee, Dai N.

Details

Application number :

2002248539  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of plasma etching organic antireflective coating  

Inventor :

Lee, Chris ; Chiang, Conan ; Jiang, Weinan ; Lin, Frank Y. ; Ni, Tuqiang ; Lee, Dai N.  

Agent name :

 

Address for service :

 

Filing date :

21 March 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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