Method for producing semiconductor substrate and semiconductor substrate

Application number :: 2002313269
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method for producing semiconductor substrate and semiconductor substrate
Inventor :: Yuasa, Mitsuhiro
Agent name :
Address for service :
Filing date :: 26 June 2002
Associated companies :
Applicant name :: TOKYO ELECTRON LIMITED
Applicant address :: 3-6, Akasaka 5-Chome, Minato-Ku, Tokyo 107-8481
Old name :
Original Source :: Go

Method for producing semiconductor substrate and semiconductor substrate A Standard patent application filed on 26 June 2002 credited to Yuasa, Mitsuhiro