Mems array, manufacturing method thereof, and mems device manufacturing method based on the same
A Standard patent application filed on 20 June 2003 credited to Yuasa, Mitsuhiro

Details

Application number :
2003244114  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Mems array, manufacturing method thereof, and mems device manufacturing method based on the same  
Inventor :
Yuasa, Mitsuhiro  
Agent name :
 
Address for service :
 
Filing date :
20 June 2003  
Associated companies :
 
Applicant name :
TOKYO ELECTRON LIMITED  
Applicant address :
3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  
Old name :
 
Original Source :
Go  

Same Inventor