Details
- Application number :
- 2001279133
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method of chemical mechanical polishing
- Inventor :
- Oh, Hilario L.
;
Saka, Nannaji
;
Lai, Jiun-Yu
- Agent name :
-
- Address for service :
-
- Filing date :
- 31 July 2001
- Associated companies :
-
- Applicant name :
- Silicon Valley Group Inc
- Applicant address :
-
- Old name :
-
- Original Source :
- Go