Details
- Application number :
- 2003290921
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method of using a soft subpad for chemical mechanical polishing
- Inventor :
- Gagliardi, John J.
- Agent name :
-
- Address for service :
-
- Filing date :
- 17 November 2003
- Associated companies :
-
- Applicant name :
- 3M INNOVATIVE PROPERTIES COMPANY
- Applicant address :
- 3M Center, Post Office Box 33427, Saint Paul, MN 55133-3427
- Old name :
-
- Original Source :
- Go