Method and device for the chemical-mechanical polishing of workpieces
A Standard patent application filed on 11 March 2003 credited to Reichmann, Marc ; Ising, Ulrich ; Keller, Thomas

Details

Application number :

2003227044  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for the chemical-mechanical polishing of workpieces  

Inventor :

Reichmann, Marc ; Ising, Ulrich ; Keller, Thomas  

Agent name :

 

Address for service :

 

Filing date :

11 March 2003  

Associated companies :

 

Applicant name :

PETER WOLTERS SURFACE TECHNOLOGIES GMBH AND CO. KG  

Applicant address :

Busumer Strasse 96, 24768 Rendsburg  

Old name :

 

Original Source :

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