Slurry composition and method of chemical mechanical polishing using same

Application number :: 48102
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Slurry composition and method of chemical mechanical polishing using same
Inventor :: Small, Robert James ; Peterson, Maria Louise ; Drouget, Jean Claude ; Bonneau, Lionel ; Troung, Tuan
Agent name :
Address for service :
Filing date :: 01 May 2000
Associated companies :
Applicant name :: EKC Technology, Inc.
Applicant address :
Old name :
Original Source :: Go

Slurry composition and method of chemical mechanical polishing using same A Standard patent application filed on 01 May 2000 credited to Small, Robert James ; Peterson, Maria Louise ; Drouget, Jean Claude ; Bonneau, Lionel ; Troung, Tuan