Integrated chemical-mechanical polishing

Application number :: 2001251318
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Integrated chemical-mechanical polishing
Inventor :: Walters, Alicia F. ; Staley, Bradley J. ; Mueller, Brian L ; Grumbine, Steven K. ; Bogush, Gregory H. ; Chamberlain, Jeffrey P. ; Feeney, Paul M. ; Schroeder, David J.
Agent name :
Address for service :
Filing date :: 05 April 2001
Associated companies :
Applicant name :: Cabot Microelectronics Corporation
Applicant address :
Old name :
Original Source :: Go

Integrated chemical-mechanical polishing A Standard patent application filed on 05 April 2001 credited to Walters, Alicia F. ; Staley, Bradley J. ; Mueller, Brian L ; Grumbine, Steven K. ; Bogush, Gregory H. ; Chamberlain, Jeffrey P. ; Feeney, Paul M. ; Schroeder, David J.