Integrated pad and belt for chemical mechanical polishing

Application number :: 65680
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Integrated pad and belt for chemical mechanical polishing
Inventor :: Pant, Anil K. ; Jairath, Rahul ; Krusell, Wilbur C. ; Chadda, Saket ; Mishra, Kamal
Agent name :
Address for service :
Filing date :: 11 February 1998
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Integrated pad and belt for chemical mechanical polishing A Standard patent application filed on 11 February 1998 credited to Pant, Anil K. ; Jairath, Rahul ; Krusell, Wilbur C. ; Chadda, Saket ; Mishra, Kamal