Low temperature process for high density thin film integrated capacitors, and amorphously frustrated ferroelectric materials therefor
A Standard patent application filed on 15 December 2000 credited to Hendrix, Bryan C.
Details
Application number :
21075
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Low temperature process for high density thin film integrated capacitors, and amorphously frustrated ferroelectric materials therefor