Wafer support system
A Standard patent application filed on 30 August 1996 credited to Halpin, Michael W. ; Hawkins, Mark R. ; Foster, Derrick W. ; Jacobs, Loren R. ; Wengert, John F. ; Van Der Jeugd, Cornelius A. ; Vyne, Robert M.

Details

Application number :
69621  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Wafer support system  
Inventor :
Halpin, Michael W. ; Hawkins, Mark R. ; Foster, Derrick W. ; Jacobs, Loren R. ; Wengert, John F. ; Van Der Jeugd, Cornelius A. ; Vyne, Robert M.  
Agent name :
 
Address for service :
 
Filing date :
30 August 1996  
Associated companies :
 
Applicant name :
Advanced Semiconductor Materials America, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Related Patents

Same Inventor