Wafer support system
A Standard patent application filed on 23 January 1998 credited to Foster, Derrick W. ; Vyne, Robert M. ; Wengert, John F. ; Van Der Jeugd, Cornelius A. ; Jacobs, Loren R. ; Halpin, Michael W. ; Goodman, Matthew ; Hartmann, Glenn ; Layton, Jason M. ; Hawkins, Mark R. ; Van Bilsen, Frank B. M.

Details

Application number :
60404  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Wafer support system  
Inventor :
Foster, Derrick W. ; Vyne, Robert M. ; Wengert, John F. ; Van Der Jeugd, Cornelius A. ; Jacobs, Loren R. ; Halpin, Michael W. ; Goodman, Matthew ; Hartmann, Glenn ; Layton, Jason M. ; Hawkins, Mark R. ; Van Bilsen, Frank B. M.  
Agent name :
 
Address for service :
 
Filing date :
23 January 1998  
Associated companies :
 
Applicant name :
ASM America, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

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