Process chamber with inner support
A Standard patent application filed on 01 August 1996 credited to Wengert, John F. ; Jacobs, Loren R. ; Halpin, Michael W. ; Hawkins, Mark R. ; Van Der Jeugd, Cornelius A. ; Vyne, Robert M. ; Foster, Derrick W.

Details

Application number :
66455  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Process chamber with inner support  
Inventor :
Wengert, John F. ; Jacobs, Loren R. ; Halpin, Michael W. ; Hawkins, Mark R. ; Van Der Jeugd, Cornelius A. ; Vyne, Robert M. ; Foster, Derrick W.  
Agent name :
 
Address for service :
 
Filing date :
01 August 1996  
Associated companies :
 
Applicant name :
Advanced Semiconductor Materials America, Inc.  
Applicant address :
 
Old name :
 
Original Source :
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Same Inventor