Susceptorless semiconductor wafer support and reactor system for epitaxial layergrowth

Application number :: 2001249808
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Susceptorless semiconductor wafer support and reactor system for epitaxial layergrowth
Inventor :: Hartmann, Dominic A. ; Boydston, Mark R. ; Dietze, Gerald R.
Agent name :
Address for service :
Filing date :: 02 April 2001
Associated companies :
Applicant name :: Seh America, Inc.
Applicant address :
Old name :
Original Source :: Go

Susceptorless semiconductor wafer support and reactor system for epitaxial layergrowth A Standard patent application filed on 02 April 2001 credited to Hartmann, Dominic A. ; Boydston, Mark R. ; Dietze, Gerald R.