Wafer drying apparatus and method

Application number :: 54460
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Wafer drying apparatus and method
Inventor :: Borkowski, Jonathan E. ; Jones, Oliver David ; McMahon, Kenneth C. ; Stephens, Donald E. ; Olivas, James M. ; Petersen, Scott ; Mehmandoust, Yassin
Agent name :
Address for service :
Filing date :: 26 May 2000
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Wafer drying apparatus and method A Standard patent application filed on 26 May 2000 credited to Borkowski, Jonathan E. ; Jones, Oliver David ; McMahon, Kenneth C. ; Stephens, Donald E. ; Olivas, James M. ; Petersen, Scott ; Mehmandoust, Yassin