Apparatus and methods for drying batches of wafers
A Standard patent application filed on 26 May 2000 credited to Borkowski, Jonathan E. ; Jones, Oliver David ; McMahon, Kenneth C. ; Stephens, Donald E. ; Olivas, James M. ; Petersen, Scott ; Mehmandoust, Yassin

Details

Application number :
51731  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and methods for drying batches of wafers  
Inventor :
Borkowski, Jonathan E. ; Jones, Oliver David ; McMahon, Kenneth C. ; Stephens, Donald E. ; Olivas, James M. ; Petersen, Scott ; Mehmandoust, Yassin  
Agent name :
 
Address for service :
 
Filing date :
26 May 2000  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor