Method of forming dielectric film
A Standard patent application filed on 17 October 2003 credited to Shinriki, Hiroshi ; Takahashi, Tsuyoshi ; Kubo, Kazumi

Details

Application number :

2003301469  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of forming dielectric film  

Inventor :

Shinriki, Hiroshi ; Takahashi, Tsuyoshi ; Kubo, Kazumi  

Agent name :

 

Address for service :

 

Filing date :

17 October 2003  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-Chome, Minato-Ku, Tokyo 107-8481  

Old name :

 

Original Source :

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