Method of forming dielectric films
A Standard patent application filed on 19 September 2001 credited to Kepten, Dr. Avashai ; Levy, Sagy ; Bloom, Robin S.

Details

Application number :

2001294668  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of forming dielectric films  

Inventor :

Kepten, Dr. Avashai ; Levy, Sagy ; Bloom, Robin S.  

Agent name :

 

Address for service :

 

Filing date :

19 September 2001  

Associated companies :

 

Applicant name :

MATTSON TECHNOLOGY, INC.  

Applicant address :

2800 Bayview Drive, Fremont, CA 94538  

Old name :

 

Original Source :

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