Method of forming a pre-metal dielectric film on a semiconductor substrate
A Standard patent application filed on 18 July 2001 credited to Whiteman, Michael D. ; Kelkar, Amit S.

Details

Application number :

2002237016  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of forming a pre-metal dielectric film on a semiconductor substrate  

Inventor :

Whiteman, Michael D. ; Kelkar, Amit S.  

Agent name :

 

Address for service :

 

Filing date :

18 July 2001  

Associated companies :

 

Applicant name :

Atmel Corporation  

Applicant address :

 

Old name :

 

Original Source :

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