Details
- Application number :
- 2003267995
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Atomic layer deposition of multi-metallic precursors
- Inventor :
- Senzaki, Yoshihide
;
Lee, Sang-In
- Agent name :
-
- Address for service :
-
- Filing date :
- 16 July 2003
- Associated companies :
-
- Applicant name :
- AVIZA TECHNOLOGY, INC.
- Applicant address :
- 440 Kings Village Road, Scotts Valley, CA 95066
- Old name :
-
- Original Source :
- Go