Details

Application number :
2003267995  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Atomic layer deposition of multi-metallic precursors  
Inventor :
Senzaki, Yoshihide ; Lee, Sang-In  
Agent name :
 
Address for service :
 
Filing date :
16 July 2003  
Associated companies :
 
Applicant name :
AVIZA TECHNOLOGY, INC.  
Applicant address :
440 Kings Village Road, Scotts Valley, CA 95066  
Old name :
 
Original Source :
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Same Inventor