Details

Application number :
2003254047  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Atomic layer deposition of high k dielectric films  
Inventor :
Senzaki, Yoshihide ; Lee, Sang-In  
Agent name :
 
Address for service :
 
Filing date :
21 July 2003  
Associated companies :
 
Applicant name :
Aviza Technology, Inc.  
Applicant address :
440 Kings Village Road Scotts Valley, CA 95066 United States of America  
Old name :
 
Original Source :
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Same Inventor