Thin film deposition apparatus

Application number :: 2003251052
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Thin film deposition apparatus
Inventor :: Halsall, Brian ; George, Christopher ; Jolly, Timothy ; Knight, Robert ; Watson, Michael
Agent name :
Address for service :
Filing date :: 13 August 2003
Associated companies :
Applicant name :: OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED
Applicant address :: Old Station Way, Eynsham, Witney, Oxon OX8 1TL
Old name :
Original Source :: Go

Thin film deposition apparatus A Standard patent application filed on 13 August 2003 credited to Halsall, Brian ; George, Christopher ; Jolly, Timothy ; Knight, Robert ; Watson, Michael