Apparatus for cyclical deposition of thin films
A Standard patent application filed on 27 January 2003 credited to Khan, Ahmad A. ; Mak, Alfred W. ; Gelatos, Avgerinos V. ; Glenn, Walter Benjamin ; Xi, Ming ; Thakur, Randhir P. S. ; Umotoy, Salvador P. ; Al-Shaikh, Ayad A.

Details

Application number :

2003238853  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for cyclical deposition of thin films  

Inventor :

Khan, Ahmad A. ; Mak, Alfred W. ; Gelatos, Avgerinos V. ; Glenn, Walter Benjamin ; Xi, Ming ; Thakur, Randhir P. S. ; Umotoy, Salvador P. ; Al-Shaikh, Ayad A.  

Agent name :

 

Address for service :

 

Filing date :

27 January 2003  

Associated companies :

 

Applicant name :

APPLIED MATERIALS, INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95054  

Old name :

 

Original Source :

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