Details
- Application number :
- 2003258844
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Flow-type thin film deposition apparatus and injector assembly therefor
- Inventor :
- Baik, Choon-Kum
;
An, Chul-Hyun
;
Chang, Ho-Seung
;
Lim, Hong-Joo
;
Park, Young-Hoon
;
Heo, Jin-Pil
;
Lee, Sang-Jin
;
Lee, Sang-Kyu
;
Kyung, Hyun-Soo
- Agent name :
-
- Address for service :
-
- Filing date :
- 01 September 2003
- Associated companies :
-
- Applicant name :
- IPS LTD.
- Applicant address :
- 33, Jije-dong, Pyungtaek-city, Kyungki-do 450-090
- Old name :
-
- Original Source :
- Go